The MEMS Module addresses design issues that arise in the micro-world. It models physical phenomena in actuators and sensors plus micro fluidic and small piezoelectric devices.

Most MEMS applications are Multiphysics by their very nature and usually include electromagnetic-structural, thermal-structural, fluid structure (FSI), or electromagnetic-fluid interactions. To this end, the MEMS Module provides equations and settings optimised for the single- and coupled-physics modelling that these interactions may require.

The module includes analyses in the stationary and transient domains as well as Eigen-frequency, parametric, quasi-static and frequency-response analyses.