MEMS Module
ACCELEROMETERS: Squeezed-film gas damping is a critical aspect of many MEMS transducers, actuators, or accelerometers, where inertia produces a motion that the device detects. The narrow gap restricts flow, which causes gas pressure to increase, and decelerates the plate's movement
The MEMS Module addresses design issues that arise in the micro-world. It models physical phenomena in actuators and sensors plus micro fluidic and small piezoelectric devices.
Most MEMS applications are Multiphysics by their very nature and usually include electromagnetic-structural, thermal-structural, fluid structure (FSI), or electromagnetic-fluid interactions. To this end, the MEMS Module provides equations and settings optimised for the single- and coupled-physics modelling that these interactions may require.
The module includes analyses in the stationary and transient domains as well as Eigen-frequency, parametric, quasi-static and frequency-response analyses.
